Enabling Technologies for MEMS and Nanodevices (Advanced Mic
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By: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
Publisher: -VCH
Pages: 439
Publication Date: 2004-09-03
ISBN-10: 352730746X
ISBN-13: 9783527307463
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