System-Level Modeling of MEMS: Volume 10


System-Level Modeling of MEMS: Volume 10 (Advanced Micro and Nanosystems)
Tamara Bechtold (Editor), Gabriele Schrag (Editor), Lihong Feng (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), Osamu Tabata (Series Editor)