Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS
Scaling Issues and Design of MEMS
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Author: Baglio, Prof Salvatore; Castorina, Prof Salvatore; Savalli, Prof Nicolo
Paperback: 245 pages
Publisher: John Wiley & Sons, Ltd.( October 27, 2008 )
ISBN-10: 047001699X

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