Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
Authors: Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur
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Publisher: Wiley(2013/5/17)
Edition: 2
Language: English
ISBN-10: 1118062779
ISBN-13: 9781118062777
e-ISBN-13: 9781118747384

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