Resonant MEMS: Fundamentals, Implementation, and Application

Resonant MEMS: Fundamentals, Implementation, and Application
Authors: Brand, Oliver; Dufour, Isabelle; Heinrich, Stephen; Josse, Fabien; Fedder , Gary K.; Hierold, Christofer; Korvink , Jan G.; Tabata, Osamu
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Publisher: Wiley(2015/4/22)
Edition: 1
Language: English
ISBN-10: 3527335455
ISBN-13: 9783527335459
e-ISBN-13: 9783527676354

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