Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Authors: Wasa, Kiyotaka
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Publisher: Elsevier Science(2014/5/14)
Edition: 2
Language: English
ISBN-10: 1437734839
ISBN-13: 9781437734836
e-ISBN-10: 1437734847
e-ISBN-13: 9781437734843

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