Atomic Layer Deposition of Nanostructured Materials

Atomic Layer Deposition of Nanostructured Materials
Authors: Pinna, Nicola; Knez, Mato

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Publisher: Wiley ( 2012-09-19 )
ISBN-13: 9783527327973
e-ISBN-13: 9783527639922
ISBN-10: 3527327975
QQ: 7450911
Edition: 1
Language: English

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