Ion Implantation and Beam Processing
Authors: Williams, J. S.; Poate, J. M.
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Publisher: Elsevier Science ( 1984/1/1 )
ISBN-13: 9780127569802
e-ISBN-13: 9781483220642
ISBN-10: 0127569804
QQ: 7450911
Edition:
Language: English
Category: Science: Physics; Science; Engineering: Electrical; Engineering
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